semilearn · 24 October 2026
SECS/GEM and GEM300, Step by Step
How semiconductor tools talk to the factory, from the wire up: HSMS framing and timers, SECS-II items, GEM states, reports and remote commands, then the 300 mm standards (E84, E87, E90, E40, E94) and how they hand off to each other for one FOUP from arrival to departure. With state machine diagrams and a working C# host and equipment sample. A living post that grows as I read more of the standards.
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